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VUV IONIZER

E-mail contact

+886-2-8772-8910

The L12542 is a newly developed electrostatic charge remover that makes use of VUV (vacuum ultraviolet) light.
Due to its wide irradiation angle about 3 times larger than our current VUV light source, the L12542 efficiently removes electrostatic charges over large areas in depressurized or vacuum environments.
Up until now two or more VUV light sources were needed to neutralize electrostatic charges in large areas due to their limited irradiation angle. The L12542 solves this problem and efficiently neutralizes large areas in a vacuum.
FEATURES
● Highly efficient ion generation in a vacuumLarge irradiation (neutralizing) area
● No air flow needed
● No overshoot (generates no opposite-polarity static charges)
● No dust and electromagnetic noise emissions
● Long life
 
APPLICATIONS
● Dechucking of electrostatic chucks
● Semiconductor manufacturing equipment(vacuum process)
● LCD manufacturing equipment
● Organic EL manufacturing equipment
● Hard disk manufacturing equipment
● Film manufacturing equipment
 
ELECTROSTATIC CHARGE REMOVAL EFFECT

 

SPECIFICATIONS

GENERAL RATINGS

Parameter

Description / Value

Unit

Spectral distribution ①

115 to 400

nm

Window material

MgF2

Cooling method

Air cooling by cooling fan

Operating temperature range

+10 to +40

°C

Storage temperature range

0 to +60

°C

Operating humidity range

Below 80 % (no condensation)

Storage humidity range

Below 85 % (no condensation)

①The ionizer internal lamp emits intense ultraviolet rays harmful to the eyes and skin. Do not look directly at the emitted light and do not expose skin to light emission.

RECOMMENDED OPERATING CONDITIONS AND CHARACTERISTICS (at 25 °C)

Parameter

Description / Value

Unit

Warm-up time

25 ± 5

s

Light source service life ②

230 nm

2000 (guaranteed)

h

160 nm

500 (expected)

Input voltage (AC)

100 V to 240 V (100 V/200 V auto switching), single phase 50 Hz / 60 Hz

Power consumption (Max.)

90

VA

②The life end is defined as the time when light output falls to 50% of its initial intensity value while operated under our measurement conditions. Note
that the light output attenuation depends greatly on the environment of the vacuum equipment.
* When ordering a replacement light source, please specify the type number "L12565".
 
SPECTRAL DISTRIBUTION & DIRECTIVITY
 
DIMENSIONAL OUTLINES

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