MEMS mirror

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產品介紹 Products Information

MEMS mirror : S12237-03P

E-mail contact

+886-2-8772-8910

Features

● Low current operation

● Ultra-miniature size

● Wide optical deflection angle

Applications

● Laser scanner unit

● Gas detection

Structure and principle

In a MEMS mirror, a metallic coil is formed on a single-crystal silicon, a mirror is formed inside the coil through MEMS processing, and a magnet is arranged beneath the mirror. Within a magnetic fi eld generated by the magnet, electrical current flowing in the coil surrounding the mirror produces a Lorentz force based on Fleming’s rule that drives the mirror tilt angle in one dimension. The path of the laser light incident on the mirror surface is varied in this way to scan and project.

Compared to the electrostatic or piezoelectric driven mirrors, electromagnetically driven MEMS mirrors are smaller, lower voltage driven, and lower power consuming.

Absolute maximum ratings

Parameter	Condition	Value	Unit
Drive current		±20	mA
Maximum optical deflection angle*1		±18	degrees
Operating temperature	No dew condensation*2	0 to +60	°C
Storage temperature	No dew condensation*2	-10 to +80	°C
Recommended soldering conditions	Using a soldering iron*3	260 °C max., within 10 s	-

*1: Angle at which the mirror makes contact with the magnet, damaging the mirror

*2: When there is a temperature difference between a product and the surrounding area in high humidity environment, dew condensation may occur on the product surface. Dew condensation on the product may cause deterioration in characteristics and reliability.

*3: The magnetic force of the mirror built into this product degrades if the mirror is exposed to high temperature. Do not use reflow soldering on this product.

Note:

As there is no window material on the S12237-03P, be sure to take measures to prevent dust adhesion and measures against moisture.

Exceeding the absolute maximum ratings even momentarily may cause a drop in product quality. Always be sure to use the product within the absolute maximum ratings.

Structure

Parameter	Min.	Typ.	Max.	Unit
Mirror size	ϕ2.59	ϕ2.60	ϕ2.61	mm
Mirror material	Aluminum			-
Operation mode	Linear mode			-

Recommended operating conditions

Parameter	Min.	Typ.	Max.	Unit
Optical deflection angle^*4	-15	-	15	degrees
Drive frequency	DC	-	100	Hz

*4: The optical defl ection angle is twice the mechanical defl ection angle.

Electrical and optical characteristics (Ta=25 °C)

Parameter	Condition	Min.	Typ.	Max.	Unit
Resonant frequency		500	530	560	Hz
Drive current	Optical deflection angle: ±15°	±12	±15	±18	mA
Coil resistance		145	165	185	Ω

Optical deflection angle

Dimensional outline (unit: mm)

檔案下載

S12237-03P datasheet MEMS Mirror Technical Information