2D Laser Scanning MEMs mirror: S13989-01H

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2D Laser Scanning MEMs mirror: S13989-01H

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2D Laser Scanning MEMs mirror: S13989-01H

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+886-2-8772-8910

Introduction

Features

Compact

Wide optical deflection angle

Low voltage drive: suitable for installation on equipment

High reliability: hermetic seal package

Slow axis: linear operation possible

Application

Machine vision (shape recognition)

Industrial LiDAR

Laser scanning microscope

Various laser scan units

Structure and principle

In a MEMS mirror, a metallic coil is formed on a single-crystal silicon, a mirror is formed inside the coil through MEMS processing, and a magnet is arranged beneath the mirror. Within a magnetic fi eld generated by the magnet, electrical current flowing in the coil surrounding the mirror produces a Lorentz force based on Fleming’s rule that drives the mirror tilt angle in one dimension. The path of the laser light incident on the mirror surface is varied in this way to scan and project.

Compared to the electrostatic or piezoelectric driven mirrors, electromagnetically driven MEMS mirrors are smaller, lower voltage driven, and lower power consuming.

Absolute maximum ratings (Ta=25 °C unless otherwise noted)

Parameter		Symbol	Condition	Min.	Typ.	Max.	Unit
Fast axis	Optical deflection angle*1	θf_max		-22	-	22	°
Slow axis	Drive current*2	Is_dc	DC current	-100	-	100	mAdc
Slow axis	Optical deflection angle*1	θs_max		-14	-	14	°
Power consumption*3		Pcoil		-	-	520	mW
Operating temperature*4		Topr	No dew condensation*5	-20	-	60	°C
Storage temperature		Tstg	No dew condensation*5	-40	-	85	°C

*1: Angle at which the torsional stress of the torsion bars becomes large and the service life is shortened

*2: DC current that causes damage to the wiring. Because driving the device with a DC current can shorten the service life, driving the device with an AC current is recommended.

*3: Coil power consumption. It is given by the following equation.

Pcoil = (Rs × Is_rms2 + Rf × If_rms2) × 2 × 1000 [mW] Is_rms, If_rms: Rms drive current

*4: Ambient temperature

*5: When there is a temperature diﬀerence between a product and the surrounding area in high humidity environment, dew condensation may occur on the product surface. Dew condensation on the product may cause deterioration in characteristics and reliability.

Note:

Exceeding the absolute maximum ratings even momentarily may cause a drop in product quality. Always be sure to use the product within the absolute maximum ratings.

Structure

Parameter		Min.	Typ.	Max.	Unit
Mirror size		ϕ1.21	ϕ1.23	ϕ1.25	mm
Mirror material		Aluminum alloy			-
Operation mode	Fast axis	Non-linear mode (resonant mode)			-
	Slow axis	Linear mode			-

Recommended operating conditions

Parameter		Symbol	Condition	Min.	Typ.	Max.	Unit
Fast axis	Incident angle*6	ϕf		-15	0	15	°
	Optical deflection angle*7	θf		-20	-	20	°
	Drive frequency	ﬀ		Resonant frequency*8			Hz
Slow axis	Incident angle*6	ϕs		-13	20	25	°
	Optical deflection angle*7	θs		-12	-	12	°
	Drive frequency	fs		10	-	100	Hz
Operating temperature*9		Topr	No dew condensation*10	-20	25	60	°C

*6: Incident angle at which a ϕ1 mm collimated laser beam is incident on the mirror positioned at an optical deflection angle of 0° and at which the laser is within the eﬀective area of the window material when scanning is performed at the recommended optical deflection angle

*7: The optical deflection angle is twice the mechanical deflection angle. The light path is oﬀset due to the refraction by the window material. This must be considered during use.

*8: The resonant frequency is diﬀerent between individual devices and also varies depending on the operating conditions. We recommend using feedback control so that the drive frequency matches the resonant frequency.

*9: Ambient temperature. Recommended operating conditions: When used in this temperature range

*10: When there is a temperature diﬀerence between a product and the surrounding area in high humidity environment, dew condensation may occur on the product surface. Dew condensation on the product may cause deterioration in characteristics and reliability.

Electrical and optical characteristics (recommended operating conditions unless otherwise noted)

Parameter		Symbol	Condition		Min.	Typ.	Max.	Unit
Reflectance*11		R	λ=460 to 640 nm		80	-	-	%
Transmittance of window material*12		T	θin=0 to 43°*13, λ=460 to 640 nm		95	-	-	%
Fast axis	Resonant frequency	ﬀ-r	Ta=25 °C, θf=±20°, Is=0 mA, square wave		28.6	29.3	30	kHz
	Drive current	If	Ta=25 °C, ﬀ=ﬀ-r, θf=±20°, Is=0 mA, square wave		12	22	34	mAamp.
	Coil resistance	Rf	Ta=25 °C, If=0.1 mA, Is=0 mA		7.5	10.5	13.5	Ω
	Back electromotive force	Vf	Ta=25 °C, θf=±20°, Is=0 mA fast axis coil readout		23	28	33	mVamp.
		Vf	Ta=25 °C, θf=±20°, Is=0 mA fast axis coil readout		23	28	33	mVamp.
		Vs	Ta=25 °C, θf=±20°, Is=0 mA slow axis coil readout		16	20	24	mVamp.
		Vs	Ta=25 °C, θf=±20°, Is=0 mA slow axis coil readout		16	20	24	mVamp.
Slow axis	Resonant frequency	fs-r	Ta=25 °C, Is=0.3 mAamp. (sin wave) If=0 mA		525	575	625	Hz
	Quality factor	Qs	Ta=25 °C, Is=0.3 mAamp. (sin wave) If=0 mA		320	400	480	-
			Ta=25 °C fs=60 Hz (sin wave) If=0 mA	θs=+12°	140	175	210	mAamp.
	Drive current	Is	Ta=25 °C fs=60 Hz (sin wave) If=0 mA	θs=-12°	-210	-175	-140	mAamp.
	Coil resistance	Rs	Ta=25 °C, If=0 mA, Is=0.1 mA		6	8	10	Ω
Temperature sensor	Resistance	Rth	Ta=25 °C, Ith=0.1 mA, If=0 mA, Is=0 mA		230	300	370	Ω
Temperature sensor	Resistance temperature coeﬃcient	α			0.36	0.38	0.4	%/°C

*11: Using a white light source

*12: Average window material transmittance of polarized light p and s. Note that, after passing through the window material, the laser light is reflected by the mirror and passes through the window material again.

*13: Incident angle to the window material

Optical deflection angle

Effect of tilting the window material

The S13989-01H has a window material tilted 20° relative to the slow axis scanning direction to achieve a highly reliable sealed package. The window material tilt is set so that the laser light reflected from the front or rear surface of the window does not enter the mirror scanning projection range.