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2D Scanning MEMs Mirror: S13124-01

E-mail contact

+886-2-8772-8910

Introduction

Features
Two-dimensional scanning in linear mode Capable of vector scanning and step operation
Compact
Low voltage drive: suitable for installation on equipment  
With window material: Prevents foreign matter contamination 
Evaluation circuit available: C15087 (sold separately)
 
Application
Machine vision (shape recognition) 
Laser measurement
Laser material processing
Various laser scan units
 
Structure and principle
In a MEMS mirror, a metallic coil is formed on a single-crystal silicon, a mirror is formed inside the coil through MEMS processing, and a magnet is arranged beneath the mirror. Within a magnetic fi eld generated by the magnet, electrical current flowing in the coil surrounding the mirror produces a Lorentz force based on Fleming’s rule that drives the mirror tilt angle in one dimension. The path of the laser light incident on the mirror surface is varied in this way to scan and project.
Compared to the electrostatic or piezoelectric driven mirrors, electromagnetically driven MEMS mirrors are smaller, lower voltage driven, and lower power consuming.
 
 
Absolute maximum ratings (Ta=25 °C unless otherwise noted)

Parameter

Symbol

Condition

Min.

Typ.

Max.

Unit

First axis

Optical deflection angle*1

θ1 max

 

-12

-

+12

°

Drive current*2

I1

 

-20

-

+20

mA

Second axis

Optical deflection angle*1

θ2 max

 

-12

-

+12

°

Drive current*2

I2

 

-25

-

+25

mA

Operating temperature*3

Topr

No dew condensation*4

-20

-

80

°C

Storage temperature*3

Tstg

No dew condensation*4

-40

-

85

°C

*1: Angle at which the torsional stress of the torsion bars becomes large and the service life is shortened
*2: Using the mirror with only one side (positive or negative) of the optical deflection angle is not
recommended, as it can shorten the service life.
*3: Ambient temperature
*4: When there is a temperature difference between a product and the surrounding area in high humidity environment, dew condensation may occur on the product surface. Dew condensation on the product may cause deterioration in characteristics and reliability.
Note:
Exceeding the absolute maximum ratings even momentarily may cause a drop in product quality. Always be sure to use the product within the absolute maximum ratings.
 
Structure

Parameter

Min.

Typ.

Max.

Unit

Mirror size

ϕ1.93

ϕ1.95

ϕ1.97

mm

Mirror material

Aluminum alloy

-

Operation mode

Fast axis, Second axis

Linear mode

-

 
 
Recommended operating conditions

Parameter

Symbol

Condition

Min

Typ.

Max.

Unit

First axis

Incident angle*5

-

 

-12

20

+21

°

Optical deflection angle*6

θ1

 

-10

-

+10

°

Drive frequency

f1

 

DC*7

-

90

Hz

Second axis

Incident angle*5

-

 

-15

0

+15

°

Optical deflection angle*6

θ2

 

-10

-

+10

°

Drive frequency

f2

 

DC*7

-

90

Hz

Operating temperature*8

Topr

No dew condensation*9

-20

25

70

°C

*5: Incident angle at which a ϕ1.95 mm collimated laser beam is incident on the mirror positioned at an optical deflection angle of 0° and at which the laser is within the effective area of the window material when scanning is performed at the recommended optical deflection angle
*6: The optical deflection angle is twice the mechanical deflection angle. The light path is offset due to the refraction by the window material. This must be considered during use.
*7: Using the mirror with only one side (positive or negative) of the optical deflection angle is not recommended, as it can shorten the service life.
*8: Ambient temperature. Recommended operating conditions: When used in this temperature range
*9: When there is a temperature difference between a product and the surrounding area in high humidity environment, dew condensation may occur on the product surface. Dew condensation on the product may cause deterioration in characteristics and reliability.
 
 
 
Electrical and optical characteristics (recommended operating conditions unless otherwise noted)

Parameter

Symbol

Condition

Min.

Typ.

Max.

Unit

Reflectance*10

R

λ=460 to 640 nm

80

-

-

%

Transmittance of window material*11

T

θin=0 to 43°*12

95*13

-

-

%

First axis

Coil resistance

R1

I1=0.1 mA
I2=0 mA

125

155

185

Ω

Resonant frequency

F1-r

I1=0.12 mAp-p
I2=0 mA

450

480

510

Hz

Quality factor

Q1

I1=0.12 mAp-p
I2=0 mA

100

120

140

-

Second axis

Coil resistance

R2

I1=0 mA
I2=0.1 mA

70

90

110

Ω

Resonant frequency

F2-r

I1=0 mA
I2=0.16 mAp-p

940

1000

1060

Hz

Quality factor

Q2

I1=0 mA
I2=0.16 mAp-p

140

165

190

-

Drive current

I1

f1=f2=DC
θ1=+10°
θ2=+10°

11.5

15

18.5

mA

I2

14

18

22

mA

I1

f1=f2=DC
θ1=-10°
θ2=-10°

-18.5

-15

-11.5

mA

I2

-22

-18

-14

mA

Temperature sensor

Resistance

Rth

I1=I2=0 mA
Ith=0.1 mA

215

270

325

Ω

Resistance temperature coefficient

α

Ith=0.1 mA
Tc=0 to 70 °C

0.35

0.38

0.42

Ω

*10: Using a white light source
*11: Average window material transmittance of polarized light p and s. Note that, after passing through the window material, the laser  light is reflected by the mirror and passes through the window material again.
*12: Incident angle to the window material
*13: Average value of λ=460 to 640 nm
 
Optical deflection angle
 
Effect of tilting the window material
The S13124-01 is equipped with the window material in order to prevent foreign matter from adhering to the mirror section. The window material tilt (20° with respect to the first axis scanning direction) is set so that the laser light reflected from the front or rear surface of the window does not enter the mirror scanning projection range.
Reflectance vs. wavelength
 
 
Spectral transmittance of window material
 
 
Optical deflection angle vs. drive current
 
 
 
Maximum optical deflection angle vs. frequency
 
Dimensional outline (unit: mm)
 
 
Mechanical deflection direction of mirror due to drive current
The direction of the mirror’s mechanical deflection varies depending on the direction of the drive current flowing through the coil as follows.
 
 
 

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